Easy-to-see dual color with sub display!

The setting conditions are displayed on the sub display, making it much easier to keep track of operations.
In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a glance.

High precision of ±3 % F.S.

A new rectification mechanism and Micro Electro Mechanical System (MEMS) technology allow the sensor to be mounted on a Si sensor chip (3 x 3.5 mm 0.118 x 0.138 in). This provides an extremely small heat capacity, high precision of ±3 % F.S. and high-speed response. The two temperature sensors on each side of the heater detect the heat distribution to make bidirectional detection possible.

One sensor for both intake and exhaust

A single sensor can detect flows bidirectionally. In addition, it can be set to detect flows in either the forward or reverse direction only, making it suitable for a variety of applications.

Smallest in its class

The 1,000 ml/min type is the smallest in size in its class. Setup is possible in narrow spaces.

Suitable for cost and quality control! Integrated output mode incorporated

Integrated output mode

■ Quality control
When the volume of flow of the gas being measured reaches the set integrated value, output switches to ON or OFF.
・Controls N₂ charging volumes for electronic components
・Controls air blowing volumes, etc.

Integrated pulse output mode

■ Cost management
The pulse output is generated once at every specified integrated value*. This lets you know the amount of air consumed per unit of time easily.
・Controls N₂ purge volumes in reflow furnaces
・Controls overall volumes of air consumed by equipment, etc.

■ Energy-saving and environmental-friendly
The pulse output from the flow sensor can be inputted to the pulse counter of an Eco-Power Meter so that air consumption and power consumption can both be measured simultaneously.

No straight pipes needed

The rectification method used by the new mechanism makes straight pipes unnecessary at both the intake and exhaust sides.

Flexible installation direction

Other than the ability to carry out bidirectional detection, there are no limitations on the installation direction, making the installation very flexible.

Connection

Quick connection is possible with a cover-attached connector.